May 28 – May 31, 2002

Boot Camp

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Laboratory-Based Industrial Short Course

Micromachining Technologies & Applications

Hands-on Training

	Course Dates
	Introduction
	Course Content and Schedule
	Registration Information
	About the Instructors
	Online Reservation Form

Dates:	Pre-Registration Deadline:	April 15, 2002
	Short Course:	May 28 – May 31, 2002

Instructors:	Dr. A. Bruno Frazier	Georgia Institute of Technology
	Dr. Mark G. Allen	Georgia Institute of Technology
	Dr. Farrokh Ayazi	Georgia Institute of Technology
	Dr. Peter J. Hesketh	Georgia Institute of Technology
	Dr. Robert J. Huber	University of Utah

Introduction:

The MEMS Boot Camp is a four-day laboratory intensive course focused on practical training in micro systems fabrication technologies (e.g., micromachining). The course agenda is evenly divided between laboratory exercises and supporting lectures. The laboratory exercises are designed to provide hands-on experience with the dominant micro systems fabrication technologies. The attendees will receive supporting material including a Laboratory Instructional Manual with details of the individual laboratory exercises, lecture notes, and a key reference book. The lectures and laboratory exercises will be led by instructors with combined experience of over 75 years in the MEMS field

Course Content:
Lectures:	Micro Systems Technologies Laboratory Based Training:
Tuesday Afternoon (1:00 PM) Introduction to Micromachining Micromachining Materials & Properties Bulk Micromachining Technologies Chemical Wet Etching Technologies         Silicon             Anisotropic             Isotropic         Glass Materials             Anisotropic             Isotropic Specialized Wet Etching Technologies         Electrochemical Etching Technologies         Photochemical Etching Technologies         Silicon-on-Insulator Technologies         Porous Silicon Technologies Wednesday Morning: Bulk Micromachining Technologies (cont.) A.   Dry Etching Technologies        Plasma Etching Technologies        Reactive Ion Etching Technologies        Inductively Coupled Plasma Etching        Cryogenic Etching Technologies        Focused Ion Beam Technologies B.   Specialized Dry Etching Technologies C.  Other Bulk Micromachining Technologies       Dissolved Wafer Technologies D.  Bulk Micromachining of Specialized Optical Materials           Quartz           Glasses           Plastics Surface Micromachining Technologies Polysilicon Technologies Micro Molding Technologies Micro Electro Forming Technologies Sacrificial Layer / Structure Technologies Thin Film Technologies Thursday Morning: Surface Micromachining Technologies (cont.) Polymer Based Devices / Systems Technologies Sealing Technologies Micro Channel Technologies Bonding Technologies         Anodic Bonding         Fusion Bonding         Polymer Bonding         Metal Bonding Applications of Micro Systems Technology Biomedical Applications Optical Electromagnetic Applications Telecommunications Friday Morning: Monolithic Micro Systems Technologies MEMS First Technologies Integrated Circuit First Technologies Forum Panel Discussion with the Course Instructors Topic: To Be Determined based on participant interest. Packaging Technologies Packaging Technologies Micro Mechanical Sensors and Actuators Micro Fluidic Devices Micro Chemical Sensors Micro Biosensors Micro Magnetic Sensors and Actuators Optical Sensors and Actuator	Tuesday Early Evening: Substrate Cleaning Procedures Silicon Membrane Technologies Isotropic Etching of Silicon and Glass Anisotropic Etching of Silicon and Glass Wednesday Afternoon: Micro Molding Technologies Micro Electroforming Technologies Sacrificial Layer Technologies Thursday Afternoon: Bonding and Packaging Technologies Micro Structure Release Technologies Friday Afternoon: Scanning Electron Microscopy Testing and Characterization

Registration Information:
The registration fee covers the course materials and luncheon meals. Option 1: Lecture & Laboratory Sessions, Option 2: Lecture-only Sessions
Early Registration Fee: (before April 15, 2002)	Option 1: $2295 Option 2: $1595
Late Registration Fee: (after April 15, 2002)	Option 1: $2495 Option 2: $1695
Registration: (register on-line or contact Dr. B. Frazier)	Dr. Bruno Frazier Georgia Institute of Technology School of Electrical & Computer Eng. 777 Atlantic Drive Atlanta, GA  30332
Hotel Accommodations:	Courtyard By Marriott 1132 Techwood Dr. Atlanta, GA (404) 607-1112

The Georgia Institute of Technology is located 20 minutes from the Hartsfield International Airport.

Taxi, bus, and rental cars are available at the airport.

Online Reservation Form

About the Instructors
Dr. A. Bruno Frazier (Lead Instructor)	Dr. Frazier is an Assistant Professor in the School of Electrical & Computer Engineering at Georgia Institute of Technology as well as Director of the Micro Instrumentation Research & Instructional Laboratories. He has been responsible for the (co-) development and patents associated with key micro systems fabrication technologies including the "Poor Man's LIGA Process" and precision plastics technologies. In addition, Dr. Frazier has active research projects in the general area of biomedical micro instrumentation and automotive micro sensor systems.  His current interest include the development of miniaturized bio-analysis systems, biomedical micro instrumentation, and advanced micro systems integration technologies for realization of these systems.
Dr. Mark G. Allen	Dr. Allen is an Associate Professor in the School of Electrical & Computer Engineering at Georgia Institute of Technology.  He is the director of the Micro Sensor and Micro Actuator Laboratories.  Dr. Allen’s research interest include the development of micromachining fabrication technologies, micro magnetic sensors and actuators, and other MEMS related technologies / applications.
Dr. Farrokh Ayazi	Dr. Ayazi is an Assistant Professor in the School of Electrical and Computer Engineering at Georgia Institute of Technology.  His current research interests are in the areas of Micro Electro Mechanical Systems (MEMS), silicon micro fabrication technologies, VLSI analog circuits for sensor readout and control, integration of high aspect-ratio silicon technologies with CMOS circuits, RF MEMS and integrated microsystems.
Dr. Peter Hesketh	Dr. Hesketh is a Professor in the School of Mechanical Engineering at Georgia Institute of Technology.  His current interests focus on biomedical MEMS instrumentation.  His contributions include the development of novel micro pump and valves, micro fluidic systems, bio-analysis systems and micro sensors.
Dr. Robert Huber	Dr. Huber has been involved in MEMS related research and development since the early stages of work in the field. Until recent retirement, Dr. Huber spent the last 20 years as a Professor of Electrical Engineering at the University of Utah. His contributions include the development of chemical / ion sensors, micro neural recording systems, and the integrated circuits for interfacing with the micro sensors. In recent years to present, Dr Huber has been collaborating with scientist at Sandia National Laboratories on MEMS related system development projects.