Bunger-Henry 256 laboratory

Introduction

The Bunger-Henry 256 lab is a class-1,000 clean room with a class-100 soft wall modular clean room in one corner. The room adjoining the clean room serves as a measurement room. This area is currently a home to several semiconductor characterization systems for optoelectronic research. Fully functional as of April 2006, the BH 256 lab is equipped with a contact photolithography system, a high-vacuum electron-gun and thermal evaporator, a rapid thermal annealing system, wet chemical benches, etc. While this lab serves as an interim for our group until the completion of the NanoTech Research Center in 2008, it nevertheless supports many of our fabrication needs. We still must make use of other tools in the more sophisticated microelectronics research center (MiRC) to complete fabrication, however.

Equipment

Metal evaporator
Karl Süss MJB-3 contact aligner

Fume hoods. 6 ft polypropylene with automatic face velocity control (left) and 4 ft stainless steel (right)
CEE 100 spin coater under a ventilation hood

AS-One rapid thermal annealing system
Additional photos

View from outside the lab
Door to the gown room

Lab entrance—measurement area and office
Gown rack

Class-100 photolithography room
Microscope with attached digital camera
Major Laboratory Development Events